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2025-02-23T12:39:31-05:00 DEBUG: VuFindSearch\Backend\Solr\Connector: => GET http://localhost:8983/solr/biblio/select?fl=%2A&wt=json&json.nl=arrarr&q=id%3A%22open-sciencenbuvgovua-87207%22&qt=morelikethis&rows=5
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2025-02-23T12:39:31-05:00 DEBUG: Deserialized SOLR response
Studies of topological features of the surface relief formation of titanium nitride films on silicon substrates during the diffusion mass transfer and on annealing using scanning tunneling microscopy
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| Main Author: | |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
2013
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| Series: | Superhard Materials |
| Online Access: | http://jnas.nbuv.gov.ua/article/UJRN-0000695825 |
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