Studies of topological features of the surface relief formation of titanium nitride films on silicon substrates during the diffusion mass transfer and on annealing using scanning tunneling microscopy
Збережено в:
| Дата: | 2013 |
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| Автор: | |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
2013
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| Назва видання: | Superhard Materials |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0000695825 |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| id |
open-sciencenbuvgovua-87207 |
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dspace |
| spelling |
open-sciencenbuvgovua-872072024-04-16T18:56:31Z Studies of topological features of the surface relief formation of titanium nitride films on silicon substrates during the diffusion mass transfer and on annealing using scanning tunneling microscopy M. A. Tsysar 0203-3119 2013 en Superhard Materials http://jnas.nbuv.gov.ua/article/UJRN-0000695825 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Superhard Materials |
| spellingShingle |
Superhard Materials M. A. Tsysar Studies of topological features of the surface relief formation of titanium nitride films on silicon substrates during the diffusion mass transfer and on annealing using scanning tunneling microscopy |
| format |
Article |
| author |
M. A. Tsysar |
| author_facet |
M. A. Tsysar |
| author_sort |
M. A. Tsysar |
| title |
Studies of topological features of the surface relief formation of titanium nitride films on silicon substrates during the diffusion mass transfer and on annealing using scanning tunneling microscopy |
| title_short |
Studies of topological features of the surface relief formation of titanium nitride films on silicon substrates during the diffusion mass transfer and on annealing using scanning tunneling microscopy |
| title_full |
Studies of topological features of the surface relief formation of titanium nitride films on silicon substrates during the diffusion mass transfer and on annealing using scanning tunneling microscopy |
| title_fullStr |
Studies of topological features of the surface relief formation of titanium nitride films on silicon substrates during the diffusion mass transfer and on annealing using scanning tunneling microscopy |
| title_full_unstemmed |
Studies of topological features of the surface relief formation of titanium nitride films on silicon substrates during the diffusion mass transfer and on annealing using scanning tunneling microscopy |
| title_sort |
studies of topological features of the surface relief formation of titanium nitride films on silicon substrates during the diffusion mass transfer and on annealing using scanning tunneling microscopy |
| publishDate |
2013 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000695825 |
| work_keys_str_mv |
AT matsysar studiesoftopologicalfeaturesofthesurfacereliefformationoftitaniumnitridefilmsonsiliconsubstratesduringthediffusionmasstransferandonannealingusingscanningtunnelingmicroscopy |
| first_indexed |
2024-04-17T06:13:50Z |
| last_indexed |
2024-04-17T06:13:50Z |
| _version_ |
1796886378505568256 |