Studies of topological features of the surface relief formation of titanium nitride films on silicon substrates during the diffusion mass transfer and on annealing using scanning tunneling microscopy

Studies of topological features of the surface relief formation of titanium nitride films on silicon substrates during the diffusion mass transfer and on annealing using scanning tunneling microscopy

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Bibliographic Details
Date:2013
Main Author: M. A. Tsysar
Format: Article
Language:English
Published: 2013
Series:Superhard Materials
Online Access:http://jnas.nbuv.gov.ua/article/UJRN-0000695825
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Journal Title:Library portal of National Academy of Sciences of Ukraine | LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS
id open-sciencenbuvgovua-87207
record_format dspace
spelling open-sciencenbuvgovua-872072024-04-16T18:56:31Z Studies of topological features of the surface relief formation of titanium nitride films on silicon substrates during the diffusion mass transfer and on annealing using scanning tunneling microscopy M. A. Tsysar 0203-3119 2013 en Superhard Materials http://jnas.nbuv.gov.ua/article/UJRN-0000695825 Article
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
collection Open-Science
language English
series Superhard Materials
spellingShingle Superhard Materials
M. A. Tsysar
Studies of topological features of the surface relief formation of titanium nitride films on silicon substrates during the diffusion mass transfer and on annealing using scanning tunneling microscopy
format Article
author M. A. Tsysar
author_facet M. A. Tsysar
author_sort M. A. Tsysar
title Studies of topological features of the surface relief formation of titanium nitride films on silicon substrates during the diffusion mass transfer and on annealing using scanning tunneling microscopy
title_short Studies of topological features of the surface relief formation of titanium nitride films on silicon substrates during the diffusion mass transfer and on annealing using scanning tunneling microscopy
title_full Studies of topological features of the surface relief formation of titanium nitride films on silicon substrates during the diffusion mass transfer and on annealing using scanning tunneling microscopy
title_fullStr Studies of topological features of the surface relief formation of titanium nitride films on silicon substrates during the diffusion mass transfer and on annealing using scanning tunneling microscopy
title_full_unstemmed Studies of topological features of the surface relief formation of titanium nitride films on silicon substrates during the diffusion mass transfer and on annealing using scanning tunneling microscopy
title_sort studies of topological features of the surface relief formation of titanium nitride films on silicon substrates during the diffusion mass transfer and on annealing using scanning tunneling microscopy
publishDate 2013
url http://jnas.nbuv.gov.ua/article/UJRN-0000695825
work_keys_str_mv AT matsysar studiesoftopologicalfeaturesofthesurfacereliefformationoftitaniumnitridefilmsonsiliconsubstratesduringthediffusionmasstransferandonannealingusingscanningtunnelingmicroscopy
first_indexed 2025-07-22T11:12:46Z
last_indexed 2025-07-22T11:12:46Z
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