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Studies of topological features of the surface relief formation of titanium nitride films on silicon substrates during the diffusion mass transfer and on annealing using scanning tunneling microscopy

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Bibliographische Detailangaben
Datum:	2013
1. Verfasser:	M. A. Tsysar
Format:	Artikel
Sprache:	Englisch
Veröffentlicht:	2013
Schriftenreihe:	Superhard Materials
Online Zugang:	http://jnas.nbuv.gov.ua/article/UJRN-0000695825
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Назва журналу:	Library portal of National Academy of Sciences of Ukraine \| LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS

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