Estimation of the efficiency of material injection into the reflex discharge by sputtering the cathode material
Збережено в:
| Дата: | 2012 |
|---|---|
| Автори: | , , , |
| Формат: | Стаття |
| Мова: | Англійська |
| Опубліковано: |
2012
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| Назва видання: | Ukrainian journal of physics |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0000685748 |
| Теги: |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
Репозитарії
Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859545263189786624 |
|---|---|
| author | Yu. V. Kovtun E. I. Skibenko A. I. Skibenko V. B. Yuferov |
| author_facet | Yu. V. Kovtun E. I. Skibenko A. I. Skibenko V. B. Yuferov |
| author_sort | Yu. V. Kovtun |
| collection | Open-Science |
| first_indexed | 2025-07-22T13:11:21Z |
| format | Article |
| id | open-sciencenbuvgovua-93111 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-22T13:11:21Z |
| publishDate | 2012 |
| record_format | dspace |
| series | Ukrainian journal of physics |
| spelling | open-sciencenbuvgovua-931112024-04-17T16:55:34Z Estimation of the efficiency of material injection into the reflex discharge by sputtering the cathode material Yu. V. Kovtun E. I. Skibenko A. I. Skibenko V. B. Yuferov 2071-0186 2012 en Ukrainian journal of physics http://jnas.nbuv.gov.ua/article/UJRN-0000685748 Article |
| spellingShingle | Ukrainian journal of physics Yu. V. Kovtun E. I. Skibenko A. I. Skibenko V. B. Yuferov Estimation of the efficiency of material injection into the reflex discharge by sputtering the cathode material |
| title | Estimation of the efficiency of material injection into the reflex discharge by sputtering the cathode material |
| title_full | Estimation of the efficiency of material injection into the reflex discharge by sputtering the cathode material |
| title_fullStr | Estimation of the efficiency of material injection into the reflex discharge by sputtering the cathode material |
| title_full_unstemmed | Estimation of the efficiency of material injection into the reflex discharge by sputtering the cathode material |
| title_short | Estimation of the efficiency of material injection into the reflex discharge by sputtering the cathode material |
| title_sort | estimation of the efficiency of material injection into the reflex discharge by sputtering the cathode material |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0000685748 |
| work_keys_str_mv | AT yuvkovtun estimationoftheefficiencyofmaterialinjectionintothereflexdischargebysputteringthecathodematerial AT eiskibenko estimationoftheefficiencyofmaterialinjectionintothereflexdischargebysputteringthecathodematerial AT aiskibenko estimationoftheefficiencyofmaterialinjectionintothereflexdischargebysputteringthecathodematerial AT vbyuferov estimationoftheefficiencyofmaterialinjectionintothereflexdischargebysputteringthecathodematerial |