Estimation of the efficiency of material injection into the reflex discharge by sputtering the cathode material

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Datum:2012
Hauptverfasser: Yu. V. Kovtun, E. I. Skibenko, A. I. Skibenko, V. B. Yuferov
Format: Artikel
Sprache:English
Veröffentlicht: 2012
Schriftenreihe:Ukrainian journal of physics
Online Zugang:http://jnas.nbuv.gov.ua/article/UJRN-0000685748
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Назва журналу:Library portal of National Academy of Sciences of Ukraine | LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS
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spelling open-sciencenbuvgovua-931112024-04-17T16:55:34Z Estimation of the efficiency of material injection into the reflex discharge by sputtering the cathode material Yu. V. Kovtun E. I. Skibenko A. I. Skibenko V. B. Yuferov 2071-0186 2012 en Ukrainian journal of physics http://jnas.nbuv.gov.ua/article/UJRN-0000685748 Article
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
collection Open-Science
language English
series Ukrainian journal of physics
spellingShingle Ukrainian journal of physics
Yu. V. Kovtun
E. I. Skibenko
A. I. Skibenko
V. B. Yuferov
Estimation of the efficiency of material injection into the reflex discharge by sputtering the cathode material
format Article
author Yu. V. Kovtun
E. I. Skibenko
A. I. Skibenko
V. B. Yuferov
author_facet Yu. V. Kovtun
E. I. Skibenko
A. I. Skibenko
V. B. Yuferov
author_sort Yu. V. Kovtun
title Estimation of the efficiency of material injection into the reflex discharge by sputtering the cathode material
title_short Estimation of the efficiency of material injection into the reflex discharge by sputtering the cathode material
title_full Estimation of the efficiency of material injection into the reflex discharge by sputtering the cathode material
title_fullStr Estimation of the efficiency of material injection into the reflex discharge by sputtering the cathode material
title_full_unstemmed Estimation of the efficiency of material injection into the reflex discharge by sputtering the cathode material
title_sort estimation of the efficiency of material injection into the reflex discharge by sputtering the cathode material
publishDate 2012
url http://jnas.nbuv.gov.ua/article/UJRN-0000685748
work_keys_str_mv AT yuvkovtun estimationoftheefficiencyofmaterialinjectionintothereflexdischargebysputteringthecathodematerial
AT eiskibenko estimationoftheefficiencyofmaterialinjectionintothereflexdischargebysputteringthecathodematerial
AT aiskibenko estimationoftheefficiencyofmaterialinjectionintothereflexdischargebysputteringthecathodematerial
AT vbyuferov estimationoftheefficiencyofmaterialinjectionintothereflexdischargebysputteringthecathodematerial
first_indexed 2025-07-22T13:11:21Z
last_indexed 2025-07-22T13:11:21Z
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