Estimation of the efficiency of material injection into the reflex discharge by sputtering the cathode material

Saved in:
Bibliographic Details
Date:2012
Main Authors: Yu. V. Kovtun, E. I. Skibenko, A. I. Skibenko, V. B. Yuferov
Format: Article
Language:English
Published: 2012
Series:Ukrainian journal of physics
Online Access:http://jnas.nbuv.gov.ua/article/UJRN-0000685748
Tags: Add Tag
No Tags, Be the first to tag this record!
Journal Title:Library portal of National Academy of Sciences of Ukraine | LibNAS

Institution

Library portal of National Academy of Sciences of Ukraine | LibNAS
_version_ 1859545263189786624
author Yu. V. Kovtun
E. I. Skibenko
A. I. Skibenko
V. B. Yuferov
author_facet Yu. V. Kovtun
E. I. Skibenko
A. I. Skibenko
V. B. Yuferov
author_sort Yu. V. Kovtun
collection Open-Science
first_indexed 2025-07-22T13:11:21Z
format Article
id open-sciencenbuvgovua-93111
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
language English
last_indexed 2025-07-22T13:11:21Z
publishDate 2012
record_format dspace
series Ukrainian journal of physics
spelling open-sciencenbuvgovua-931112024-04-17T16:55:34Z Estimation of the efficiency of material injection into the reflex discharge by sputtering the cathode material Yu. V. Kovtun E. I. Skibenko A. I. Skibenko V. B. Yuferov 2071-0186 2012 en Ukrainian journal of physics http://jnas.nbuv.gov.ua/article/UJRN-0000685748 Article
spellingShingle Ukrainian journal of physics
Yu. V. Kovtun
E. I. Skibenko
A. I. Skibenko
V. B. Yuferov
Estimation of the efficiency of material injection into the reflex discharge by sputtering the cathode material
title Estimation of the efficiency of material injection into the reflex discharge by sputtering the cathode material
title_full Estimation of the efficiency of material injection into the reflex discharge by sputtering the cathode material
title_fullStr Estimation of the efficiency of material injection into the reflex discharge by sputtering the cathode material
title_full_unstemmed Estimation of the efficiency of material injection into the reflex discharge by sputtering the cathode material
title_short Estimation of the efficiency of material injection into the reflex discharge by sputtering the cathode material
title_sort estimation of the efficiency of material injection into the reflex discharge by sputtering the cathode material
url http://jnas.nbuv.gov.ua/article/UJRN-0000685748
work_keys_str_mv AT yuvkovtun estimationoftheefficiencyofmaterialinjectionintothereflexdischargebysputteringthecathodematerial
AT eiskibenko estimationoftheefficiencyofmaterialinjectionintothereflexdischargebysputteringthecathodematerial
AT aiskibenko estimationoftheefficiencyofmaterialinjectionintothereflexdischargebysputteringthecathodematerial
AT vbyuferov estimationoftheefficiencyofmaterialinjectionintothereflexdischargebysputteringthecathodematerial