Estimation of the efficiency of material injection into the reflex discharge by sputtering the cathode material
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| Datum: | 2012 |
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| Hauptverfasser: | , , , |
| Format: | Artikel |
| Sprache: | Englisch |
| Veröffentlicht: |
2012
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| Schriftenreihe: | Ukrainian Journal of Physics |
| Online Zugang: | http://jnas.nbuv.gov.ua/article/UJRN-0000724890 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859545449302589440 |
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| author | Yu. V. Kovtun Ye. I. Skibenko A. I. Skybenko V. B. Yuferov |
| author_facet | Yu. V. Kovtun Ye. I. Skibenko A. I. Skybenko V. B. Yuferov |
| author_sort | Yu. V. Kovtun |
| collection | Open-Science |
| first_indexed | 2025-07-22T13:17:12Z |
| format | Article |
| id | open-sciencenbuvgovua-93350 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-22T13:17:12Z |
| publishDate | 2012 |
| record_format | dspace |
| series | Ukrainian Journal of Physics |
| spelling | open-sciencenbuvgovua-933502024-04-17T16:57:41Z Estimation of the efficiency of material injection into the reflex discharge by sputtering the cathode material Yu. V. Kovtun Ye. I. Skibenko A. I. Skybenko V. B. Yuferov 0372-400X 2012 en Ukrainian Journal of Physics http://jnas.nbuv.gov.ua/article/UJRN-0000724890 Article |
| spellingShingle | Ukrainian Journal of Physics Yu. V. Kovtun Ye. I. Skibenko A. I. Skybenko V. B. Yuferov Estimation of the efficiency of material injection into the reflex discharge by sputtering the cathode material |
| title | Estimation of the efficiency of material injection into the reflex discharge by sputtering the cathode material |
| title_full | Estimation of the efficiency of material injection into the reflex discharge by sputtering the cathode material |
| title_fullStr | Estimation of the efficiency of material injection into the reflex discharge by sputtering the cathode material |
| title_full_unstemmed | Estimation of the efficiency of material injection into the reflex discharge by sputtering the cathode material |
| title_short | Estimation of the efficiency of material injection into the reflex discharge by sputtering the cathode material |
| title_sort | estimation of the efficiency of material injection into the reflex discharge by sputtering the cathode material |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0000724890 |
| work_keys_str_mv | AT yuvkovtun estimationoftheefficiencyofmaterialinjectionintothereflexdischargebysputteringthecathodematerial AT yeiskibenko estimationoftheefficiencyofmaterialinjectionintothereflexdischargebysputteringthecathodematerial AT aiskybenko estimationoftheefficiencyofmaterialinjectionintothereflexdischargebysputteringthecathodematerial AT vbyuferov estimationoftheefficiencyofmaterialinjectionintothereflexdischargebysputteringthecathodematerial |