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Estimation of the efficiency of material injection into the reflex discharge by sputtering the cathode material

Estimation of the efficiency of material injection into the reflex discharge by sputtering the cathode material

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Bibliographic Details
Main Authors: Yu. V. Kovtun, Ye. I. Skibenko, A. I. Skybenko, V. B. Yuferov
Format: Article
Language:English
Published: 2012
Series:Ukrainian Journal of Physics
Online Access:http://jnas.nbuv.gov.ua/article/UJRN-0000724890
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spelling open-sciencenbuvgovua-933502024-04-17T16:57:41Z Estimation of the efficiency of material injection into the reflex discharge by sputtering the cathode material Yu. V. Kovtun Ye. I. Skibenko A. I. Skybenko V. B. Yuferov 0372-400X 2012 en Ukrainian Journal of Physics http://jnas.nbuv.gov.ua/article/UJRN-0000724890 Article
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
collection Open-Science
language English
series Ukrainian Journal of Physics
spellingShingle Ukrainian Journal of Physics
Yu. V. Kovtun
Ye. I. Skibenko
A. I. Skybenko
V. B. Yuferov
Estimation of the efficiency of material injection into the reflex discharge by sputtering the cathode material
format Article
author Yu. V. Kovtun
Ye. I. Skibenko
A. I. Skybenko
V. B. Yuferov
author_facet Yu. V. Kovtun
Ye. I. Skibenko
A. I. Skybenko
V. B. Yuferov
author_sort Yu. V. Kovtun
title Estimation of the efficiency of material injection into the reflex discharge by sputtering the cathode material
title_short Estimation of the efficiency of material injection into the reflex discharge by sputtering the cathode material
title_full Estimation of the efficiency of material injection into the reflex discharge by sputtering the cathode material
title_fullStr Estimation of the efficiency of material injection into the reflex discharge by sputtering the cathode material
title_full_unstemmed Estimation of the efficiency of material injection into the reflex discharge by sputtering the cathode material
title_sort estimation of the efficiency of material injection into the reflex discharge by sputtering the cathode material
publishDate 2012
url http://jnas.nbuv.gov.ua/article/UJRN-0000724890
work_keys_str_mv AT yuvkovtun estimationoftheefficiencyofmaterialinjectionintothereflexdischargebysputteringthecathodematerial
AT yeiskibenko estimationoftheefficiencyofmaterialinjectionintothereflexdischargebysputteringthecathodematerial
AT aiskybenko estimationoftheefficiencyofmaterialinjectionintothereflexdischargebysputteringthecathodematerial
AT vbyuferov estimationoftheefficiencyofmaterialinjectionintothereflexdischargebysputteringthecathodematerial
first_indexed 2024-04-18T05:13:16Z
last_indexed 2024-04-18T05:13:16Z
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