Estimation of the efficiency of material injection into the reflex discharge by sputtering the cathode material

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Bibliographic Details
Date:2012
Main Authors: Yu. V. Kovtun, Ye. I. Skibenko, A. I. Skybenko, V. B. Yuferov
Format: Article
Language:English
Published: 2012
Series:Ukrainian Journal of Physics
Online Access:http://jnas.nbuv.gov.ua/article/UJRN-0000724890
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Journal Title:Library portal of National Academy of Sciences of Ukraine | LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS
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author Yu. V. Kovtun
Ye. I. Skibenko
A. I. Skybenko
V. B. Yuferov
author_facet Yu. V. Kovtun
Ye. I. Skibenko
A. I. Skybenko
V. B. Yuferov
author_sort Yu. V. Kovtun
collection Open-Science
first_indexed 2025-07-22T13:17:12Z
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institution Library portal of National Academy of Sciences of Ukraine | LibNAS
language English
last_indexed 2025-07-22T13:17:12Z
publishDate 2012
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series Ukrainian Journal of Physics
spelling open-sciencenbuvgovua-933502024-04-17T16:57:41Z Estimation of the efficiency of material injection into the reflex discharge by sputtering the cathode material Yu. V. Kovtun Ye. I. Skibenko A. I. Skybenko V. B. Yuferov 0372-400X 2012 en Ukrainian Journal of Physics http://jnas.nbuv.gov.ua/article/UJRN-0000724890 Article
spellingShingle Ukrainian Journal of Physics
Yu. V. Kovtun
Ye. I. Skibenko
A. I. Skybenko
V. B. Yuferov
Estimation of the efficiency of material injection into the reflex discharge by sputtering the cathode material
title Estimation of the efficiency of material injection into the reflex discharge by sputtering the cathode material
title_full Estimation of the efficiency of material injection into the reflex discharge by sputtering the cathode material
title_fullStr Estimation of the efficiency of material injection into the reflex discharge by sputtering the cathode material
title_full_unstemmed Estimation of the efficiency of material injection into the reflex discharge by sputtering the cathode material
title_short Estimation of the efficiency of material injection into the reflex discharge by sputtering the cathode material
title_sort estimation of the efficiency of material injection into the reflex discharge by sputtering the cathode material
url http://jnas.nbuv.gov.ua/article/UJRN-0000724890
work_keys_str_mv AT yuvkovtun estimationoftheefficiencyofmaterialinjectionintothereflexdischargebysputteringthecathodematerial
AT yeiskibenko estimationoftheefficiencyofmaterialinjectionintothereflexdischargebysputteringthecathodematerial
AT aiskybenko estimationoftheefficiencyofmaterialinjectionintothereflexdischargebysputteringthecathodematerial
AT vbyuferov estimationoftheefficiencyofmaterialinjectionintothereflexdischargebysputteringthecathodematerial