Low-temperature ion-plasma deposition technology of nanostructured films of aluminum and boron nitrides
Збережено в:
| Дата: | 2021 |
|---|---|
| Автори: | , , , |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
2021
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| Назва видання: | Optoelectronics and Semiconductor Technique |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0001342045 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| id |
open-sciencenbuvgovua-9372 |
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open-sciencenbuvgovua-93722024-02-25T16:11:29Z Low-temperature ion-plasma deposition technology of nanostructured films of aluminum and boron nitrides M. S. Zaiats V. H. Boiko B. M. Romaniuk P. M. Lytvyn 2707-6806 2021 en Optoelectronics and Semiconductor Technique http://jnas.nbuv.gov.ua/article/UJRN-0001342045 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Optoelectronics and Semiconductor Technique |
| spellingShingle |
Optoelectronics and Semiconductor Technique M. S. Zaiats V. H. Boiko B. M. Romaniuk P. M. Lytvyn Low-temperature ion-plasma deposition technology of nanostructured films of aluminum and boron nitrides |
| format |
Article |
| author |
M. S. Zaiats V. H. Boiko B. M. Romaniuk P. M. Lytvyn |
| author_facet |
M. S. Zaiats V. H. Boiko B. M. Romaniuk P. M. Lytvyn |
| author_sort |
M. S. Zaiats |
| title |
Low-temperature ion-plasma deposition technology of nanostructured films of aluminum and boron nitrides |
| title_short |
Low-temperature ion-plasma deposition technology of nanostructured films of aluminum and boron nitrides |
| title_full |
Low-temperature ion-plasma deposition technology of nanostructured films of aluminum and boron nitrides |
| title_fullStr |
Low-temperature ion-plasma deposition technology of nanostructured films of aluminum and boron nitrides |
| title_full_unstemmed |
Low-temperature ion-plasma deposition technology of nanostructured films of aluminum and boron nitrides |
| title_sort |
low-temperature ion-plasma deposition technology of nanostructured films of aluminum and boron nitrides |
| publishDate |
2021 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0001342045 |
| work_keys_str_mv |
AT mszaiats lowtemperatureionplasmadepositiontechnologyofnanostructuredfilmsofaluminumandboronnitrides AT vhboiko lowtemperatureionplasmadepositiontechnologyofnanostructuredfilmsofaluminumandboronnitrides AT bmromaniuk lowtemperatureionplasmadepositiontechnologyofnanostructuredfilmsofaluminumandboronnitrides AT pmlytvyn lowtemperatureionplasmadepositiontechnologyofnanostructuredfilmsofaluminumandboronnitrides |
| first_indexed |
2024-03-30T06:53:49Z |
| last_indexed |
2024-03-30T06:53:49Z |
| _version_ |
1796878245393596416 |