Low-temperature ion-plasma deposition technology of nanostructured films of aluminum and boron nitrides
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| Date: | 2021 |
|---|---|
| Main Authors: | , , , |
| Format: | Article |
| Language: | English |
| Published: |
2021
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| Series: | Optoelectronics and Semiconductor Technique |
| Online Access: | http://jnas.nbuv.gov.ua/article/UJRN-0001342045 |
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| Journal Title: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859491930484768768 |
|---|---|
| author | M. S. Zaiats V. H. Boiko B. M. Romaniuk P. M. Lytvyn |
| author_facet | M. S. Zaiats V. H. Boiko B. M. Romaniuk P. M. Lytvyn |
| author_sort | M. S. Zaiats |
| collection | Open-Science |
| first_indexed | 2025-07-17T11:51:09Z |
| format | Article |
| id | open-sciencenbuvgovua-9372 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-17T11:51:09Z |
| publishDate | 2021 |
| record_format | dspace |
| series | Optoelectronics and Semiconductor Technique |
| spelling | open-sciencenbuvgovua-93722024-02-25T16:11:29Z Low-temperature ion-plasma deposition technology of nanostructured films of aluminum and boron nitrides M. S. Zaiats V. H. Boiko B. M. Romaniuk P. M. Lytvyn 2707-6806 2021 en Optoelectronics and Semiconductor Technique http://jnas.nbuv.gov.ua/article/UJRN-0001342045 Article |
| spellingShingle | Optoelectronics and Semiconductor Technique M. S. Zaiats V. H. Boiko B. M. Romaniuk P. M. Lytvyn Low-temperature ion-plasma deposition technology of nanostructured films of aluminum and boron nitrides |
| title | Low-temperature ion-plasma deposition technology of nanostructured films of aluminum and boron nitrides |
| title_full | Low-temperature ion-plasma deposition technology of nanostructured films of aluminum and boron nitrides |
| title_fullStr | Low-temperature ion-plasma deposition technology of nanostructured films of aluminum and boron nitrides |
| title_full_unstemmed | Low-temperature ion-plasma deposition technology of nanostructured films of aluminum and boron nitrides |
| title_short | Low-temperature ion-plasma deposition technology of nanostructured films of aluminum and boron nitrides |
| title_sort | low-temperature ion-plasma deposition technology of nanostructured films of aluminum and boron nitrides |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0001342045 |
| work_keys_str_mv | AT mszaiats lowtemperatureionplasmadepositiontechnologyofnanostructuredfilmsofaluminumandboronnitrides AT vhboiko lowtemperatureionplasmadepositiontechnologyofnanostructuredfilmsofaluminumandboronnitrides AT bmromaniuk lowtemperatureionplasmadepositiontechnologyofnanostructuredfilmsofaluminumandboronnitrides AT pmlytvyn lowtemperatureionplasmadepositiontechnologyofnanostructuredfilmsofaluminumandboronnitrides |