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Low-temperature ion-plasma deposition technology of nanostructured films of aluminum and boron nitrides

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Bibliographic Details
Date:	2021
Main Authors:	M. S. Zaiats, V. H. Boiko, B. M. Romaniuk, P. M. Lytvyn
Format:	Article
Language:	English
Published:	2021
Series:	Optoelectronics and Semiconductor Technique
Online Access:	http://jnas.nbuv.gov.ua/article/UJRN-0001342045
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Journal Title:	Library portal of National Academy of Sciences of Ukraine \| LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS

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