Deposition of the stoichiometric coatings by reactive magnetron sputtering
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| Date: | 2012 |
|---|---|
| Main Authors: | , , |
| Format: | Article |
| Language: | English |
| Published: |
2012
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| Series: | Physical surface engineering |
| Online Access: | http://jnas.nbuv.gov.ua/article/UJRN-0000906899 |
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| Journal Title: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859546063958966272 |
|---|---|
| author | A. Sagalovych S. Dudnik V. Sagalovych |
| author_facet | A. Sagalovych S. Dudnik V. Sagalovych |
| author_sort | A. Sagalovych |
| collection | Open-Science |
| first_indexed | 2025-07-22T13:33:11Z |
| format | Article |
| id | open-sciencenbuvgovua-94120 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-22T13:33:11Z |
| publishDate | 2012 |
| record_format | dspace |
| series | Physical surface engineering |
| spelling | open-sciencenbuvgovua-941202024-04-17T17:04:15Z Deposition of the stoichiometric coatings by reactive magnetron sputtering A. Sagalovych S. Dudnik V. Sagalovych 1999-8074 2012 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0000906899 Article |
| spellingShingle | Physical surface engineering A. Sagalovych S. Dudnik V. Sagalovych Deposition of the stoichiometric coatings by reactive magnetron sputtering |
| title | Deposition of the stoichiometric coatings by reactive magnetron sputtering |
| title_full | Deposition of the stoichiometric coatings by reactive magnetron sputtering |
| title_fullStr | Deposition of the stoichiometric coatings by reactive magnetron sputtering |
| title_full_unstemmed | Deposition of the stoichiometric coatings by reactive magnetron sputtering |
| title_short | Deposition of the stoichiometric coatings by reactive magnetron sputtering |
| title_sort | deposition of the stoichiometric coatings by reactive magnetron sputtering |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0000906899 |
| work_keys_str_mv | AT asagalovych depositionofthestoichiometriccoatingsbyreactivemagnetronsputtering AT sdudnik depositionofthestoichiometriccoatingsbyreactivemagnetronsputtering AT vsagalovych depositionofthestoichiometriccoatingsbyreactivemagnetronsputtering |