Impact of sidewall spacer on gate leakage behavior of nano-scale MOSFETs
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| Datum: | 2011 |
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| Hauptverfasser: | , , |
| Format: | Artikel |
| Sprache: | Englisch |
| Veröffentlicht: |
2011
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| Schriftenreihe: | Semiconductor Physics, Quantum Electronics and Optoelectronics |
| Online Zugang: | http://jnas.nbuv.gov.ua/article/UJRN-0000349496 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859547422009589760 |
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| author | A. K. Rana N. Chand V. Kapoor |
| author_facet | A. K. Rana N. Chand V. Kapoor |
| author_sort | A. K. Rana |
| collection | Open-Science |
| first_indexed | 2025-07-22T14:07:35Z |
| format | Article |
| id | open-sciencenbuvgovua-96140 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-22T14:07:35Z |
| publishDate | 2011 |
| record_format | dspace |
| series | Semiconductor Physics, Quantum Electronics and Optoelectronics |
| spelling | open-sciencenbuvgovua-961402024-04-17T17:25:04Z Impact of sidewall spacer on gate leakage behavior of nano-scale MOSFETs A. K. Rana N. Chand V. Kapoor 1560-8034 2011 en Semiconductor Physics, Quantum Electronics and Optoelectronics http://jnas.nbuv.gov.ua/article/UJRN-0000349496 Article |
| spellingShingle | Semiconductor Physics, Quantum Electronics and Optoelectronics A. K. Rana N. Chand V. Kapoor Impact of sidewall spacer on gate leakage behavior of nano-scale MOSFETs |
| title | Impact of sidewall spacer on gate leakage behavior of nano-scale MOSFETs |
| title_full | Impact of sidewall spacer on gate leakage behavior of nano-scale MOSFETs |
| title_fullStr | Impact of sidewall spacer on gate leakage behavior of nano-scale MOSFETs |
| title_full_unstemmed | Impact of sidewall spacer on gate leakage behavior of nano-scale MOSFETs |
| title_short | Impact of sidewall spacer on gate leakage behavior of nano-scale MOSFETs |
| title_sort | impact of sidewall spacer on gate leakage behavior of nano-scale mosfets |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0000349496 |
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