Impact of sidewall spacer on gate leakage behavior of nano-scale MOSFETs
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| Date: | 2011 |
|---|---|
| Main Authors: | , , |
| Format: | Article |
| Language: | English |
| Published: |
2011
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| Series: | Semiconductor Physics, Quantum Electronics and Optoelectronics |
| Online Access: | http://jnas.nbuv.gov.ua/article/UJRN-0000349496 |
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| Journal Title: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| id |
open-sciencenbuvgovua-96140 |
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open-sciencenbuvgovua-961402024-04-17T17:25:04Z Impact of sidewall spacer on gate leakage behavior of nano-scale MOSFETs A. K. Rana N. Chand V. Kapoor 1560-8034 2011 en Semiconductor Physics, Quantum Electronics and Optoelectronics http://jnas.nbuv.gov.ua/article/UJRN-0000349496 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Semiconductor Physics, Quantum Electronics and Optoelectronics |
| spellingShingle |
Semiconductor Physics, Quantum Electronics and Optoelectronics A. K. Rana N. Chand V. Kapoor Impact of sidewall spacer on gate leakage behavior of nano-scale MOSFETs |
| format |
Article |
| author |
A. K. Rana N. Chand V. Kapoor |
| author_facet |
A. K. Rana N. Chand V. Kapoor |
| author_sort |
A. K. Rana |
| title |
Impact of sidewall spacer on gate leakage behavior of nano-scale MOSFETs |
| title_short |
Impact of sidewall spacer on gate leakage behavior of nano-scale MOSFETs |
| title_full |
Impact of sidewall spacer on gate leakage behavior of nano-scale MOSFETs |
| title_fullStr |
Impact of sidewall spacer on gate leakage behavior of nano-scale MOSFETs |
| title_full_unstemmed |
Impact of sidewall spacer on gate leakage behavior of nano-scale MOSFETs |
| title_sort |
impact of sidewall spacer on gate leakage behavior of nano-scale mosfets |
| publishDate |
2011 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000349496 |
| work_keys_str_mv |
AT akrana impactofsidewallspacerongateleakagebehaviorofnanoscalemosfets AT nchand impactofsidewallspacerongateleakagebehaviorofnanoscalemosfets AT vkapoor impactofsidewallspacerongateleakagebehaviorofnanoscalemosfets |
| first_indexed |
2025-07-22T14:07:35Z |
| last_indexed |
2025-07-22T14:07:35Z |
| _version_ |
1850421529318260736 |