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2025-02-22T16:32:49-05:00 DEBUG: Deserialized SOLR response
Structural properties of nanocomposite SiO2(Si) films obtained by ion-plasma sputtering and thermal annealing

Structural properties of nanocomposite SiO2(Si) films obtained by ion-plasma sputtering and thermal annealing

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Bibliographic Details
Main Authors: O. L. Bratus, A. A. Evtukh, O. S. Lytvyn, M. V. Voitovych, V. O. Yukhymchuk
Format: Article
Language:English
Published: 2011
Series:Semiconductor Physics, Quantum Electronics and Optoelectronics
Online Access:http://jnas.nbuv.gov.ua/article/UJRN-0000349503
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Internet

http://jnas.nbuv.gov.ua/article/UJRN-0000349503

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