Structural properties of nanocomposite SiO2(Si) films obtained by ion-plasma sputtering and thermal annealing
Saved in:
| Date: | 2011 |
|---|---|
| Main Authors: | , , , , |
| Format: | Article |
| Language: | English |
| Published: |
2011
|
| Series: | Semiconductor Physics, Quantum Electronics and Optoelectronics |
| Online Access: | http://jnas.nbuv.gov.ua/article/UJRN-0000349503 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Journal Title: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
Institution
Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859547423879200768 |
|---|---|
| author | O. L. Bratus A. A. Evtukh O. S. Lytvyn M. V. Voitovych V. O. Yukhymchuk |
| author_facet | O. L. Bratus A. A. Evtukh O. S. Lytvyn M. V. Voitovych V. O. Yukhymchuk |
| author_sort | O. L. Bratus |
| collection | Open-Science |
| first_indexed | 2025-07-22T14:07:37Z |
| format | Article |
| id | open-sciencenbuvgovua-96147 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-22T14:07:37Z |
| publishDate | 2011 |
| record_format | dspace |
| series | Semiconductor Physics, Quantum Electronics and Optoelectronics |
| spelling | open-sciencenbuvgovua-961472024-04-17T17:25:09Z Structural properties of nanocomposite SiO2(Si) films obtained by ion-plasma sputtering and thermal annealing O. L. Bratus A. A. Evtukh O. S. Lytvyn M. V. Voitovych V. O. Yukhymchuk 1560-8034 2011 en Semiconductor Physics, Quantum Electronics and Optoelectronics http://jnas.nbuv.gov.ua/article/UJRN-0000349503 Article |
| spellingShingle | Semiconductor Physics, Quantum Electronics and Optoelectronics O. L. Bratus A. A. Evtukh O. S. Lytvyn M. V. Voitovych V. O. Yukhymchuk Structural properties of nanocomposite SiO2(Si) films obtained by ion-plasma sputtering and thermal annealing |
| title | Structural properties of nanocomposite SiO2(Si) films obtained by ion-plasma sputtering and thermal annealing |
| title_full | Structural properties of nanocomposite SiO2(Si) films obtained by ion-plasma sputtering and thermal annealing |
| title_fullStr | Structural properties of nanocomposite SiO2(Si) films obtained by ion-plasma sputtering and thermal annealing |
| title_full_unstemmed | Structural properties of nanocomposite SiO2(Si) films obtained by ion-plasma sputtering and thermal annealing |
| title_short | Structural properties of nanocomposite SiO2(Si) films obtained by ion-plasma sputtering and thermal annealing |
| title_sort | structural properties of nanocomposite sio2(si) films obtained by ion-plasma sputtering and thermal annealing |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0000349503 |
| work_keys_str_mv | AT olbratus structuralpropertiesofnanocompositesio2sifilmsobtainedbyionplasmasputteringandthermalannealing AT aaevtukh structuralpropertiesofnanocompositesio2sifilmsobtainedbyionplasmasputteringandthermalannealing AT oslytvyn structuralpropertiesofnanocompositesio2sifilmsobtainedbyionplasmasputteringandthermalannealing AT mvvoitovych structuralpropertiesofnanocompositesio2sifilmsobtainedbyionplasmasputteringandthermalannealing AT voyukhymchuk structuralpropertiesofnanocompositesio2sifilmsobtainedbyionplasmasputteringandthermalannealing |