Structural properties of nanocomposite SiO2(Si) films obtained by ion-plasma sputtering and thermal annealing
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| Дата: | 2011 |
|---|---|
| Автори: | , , , , |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
2011
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| Назва видання: | Semiconductor Physics, Quantum Electronics and Optoelectronics |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0000349503 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| id |
open-sciencenbuvgovua-96147 |
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open-sciencenbuvgovua-961472024-04-17T17:25:09Z Structural properties of nanocomposite SiO2(Si) films obtained by ion-plasma sputtering and thermal annealing O. L. Bratus A. A. Evtukh O. S. Lytvyn M. V. Voitovych V. O. Yukhymchuk 1560-8034 2011 en Semiconductor Physics, Quantum Electronics and Optoelectronics http://jnas.nbuv.gov.ua/article/UJRN-0000349503 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Semiconductor Physics, Quantum Electronics and Optoelectronics |
| spellingShingle |
Semiconductor Physics, Quantum Electronics and Optoelectronics O. L. Bratus A. A. Evtukh O. S. Lytvyn M. V. Voitovych V. O. Yukhymchuk Structural properties of nanocomposite SiO2(Si) films obtained by ion-plasma sputtering and thermal annealing |
| format |
Article |
| author |
O. L. Bratus A. A. Evtukh O. S. Lytvyn M. V. Voitovych V. O. Yukhymchuk |
| author_facet |
O. L. Bratus A. A. Evtukh O. S. Lytvyn M. V. Voitovych V. O. Yukhymchuk |
| author_sort |
O. L. Bratus |
| title |
Structural properties of nanocomposite SiO2(Si) films obtained by ion-plasma sputtering and thermal annealing |
| title_short |
Structural properties of nanocomposite SiO2(Si) films obtained by ion-plasma sputtering and thermal annealing |
| title_full |
Structural properties of nanocomposite SiO2(Si) films obtained by ion-plasma sputtering and thermal annealing |
| title_fullStr |
Structural properties of nanocomposite SiO2(Si) films obtained by ion-plasma sputtering and thermal annealing |
| title_full_unstemmed |
Structural properties of nanocomposite SiO2(Si) films obtained by ion-plasma sputtering and thermal annealing |
| title_sort |
structural properties of nanocomposite sio2(si) films obtained by ion-plasma sputtering and thermal annealing |
| publishDate |
2011 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000349503 |
| work_keys_str_mv |
AT olbratus structuralpropertiesofnanocompositesio2sifilmsobtainedbyionplasmasputteringandthermalannealing AT aaevtukh structuralpropertiesofnanocompositesio2sifilmsobtainedbyionplasmasputteringandthermalannealing AT oslytvyn structuralpropertiesofnanocompositesio2sifilmsobtainedbyionplasmasputteringandthermalannealing AT mvvoitovych structuralpropertiesofnanocompositesio2sifilmsobtainedbyionplasmasputteringandthermalannealing AT voyukhymchuk structuralpropertiesofnanocompositesio2sifilmsobtainedbyionplasmasputteringandthermalannealing |
| first_indexed |
2025-07-22T14:07:37Z |
| last_indexed |
2025-07-22T14:07:37Z |
| _version_ |
1850421530085818368 |