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2025-02-23T13:49:18-05:00 DEBUG: VuFindSearch\Backend\Solr\Connector: <= 200 OK
2025-02-23T13:49:18-05:00 DEBUG: Deserialized SOLR response
Study of probe methods for fabrication of units for nanoelectronic devices and diagnostic technique using electrostatic force microscopy

Study of probe methods for fabrication of units for nanoelectronic devices and diagnostic technique using electrostatic force microscopy

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Bibliographic Details
Main Authors: N. I. Khodakovskij, Ju. Larkin, G. G. Galstjan
Format: Article
Language:English
Published: 2011
Series:Nanosystems, nanomaterials, nanotechnologies
Online Access:http://jnas.nbuv.gov.ua/article/UJRN-0000473640
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Internet

http://jnas.nbuv.gov.ua/article/UJRN-0000473640

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