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Study of probe methods for fabrication of units for nanoelectronic devices and diagnostic technique using electrostatic force microscopy

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Bibliographic Details
Date:	2011
Main Authors:	N. I. Khodakovskij, Ju. Larkin, G. G. Galstjan
Format:	Article
Language:	English
Published:	2011
Series:	Nanosystems, nanomaterials, nanotechnologies
Online Access:	http://jnas.nbuv.gov.ua/article/UJRN-0000473640
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Journal Title:	Library portal of National Academy of Sciences of Ukraine \| LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS

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