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The process of forming the polycrystalline silicon wafer from the powder raw material and analyzing the impurity composition of their surface

The process of forming the polycrystalline silicon wafer from the powder raw material and analyzing the impurity composition of their surface

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Bibliographic Details
Main Authors: R. Aliev, L. Olimov, E. Mukhtarov, Zh. Alieva
Format: Article
Language:English
Published: 2011
Series:Physical surface engineering
Online Access:http://jnas.nbuv.gov.ua/article/UJRN-0000889687
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Internet

http://jnas.nbuv.gov.ua/article/UJRN-0000889687

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