Дослiдження методами ядерного мiкроаналiзу поверхневих наношарiв структури золото–кремнiй
The Rutherford backscattering and particle-induced X-ray emission methods are used to study the surface layers in gold–silicon structures, the parameters of which govern the operational characteristics of electron devices constructed on their basis. The measurements are performed on a high-precision...
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| Date: | 2018 |
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| Main Authors: | , , , , |
| Format: | Article |
| Language: | English Ukrainian |
| Published: |
Publishing house "Academperiodika"
2018
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| Subjects: | |
| Online Access: | https://ujp.bitp.kiev.ua/index.php/ujp/article/view/2018296 |
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| Journal Title: | Ukrainian Journal of Physics |