Дослiдження рекомбiнацiйних характеристик Cz-кремнiю, iмплантованого iонами залiза

• Date: 2018
• Main Authors: Gamov, D. V., Gudymenko, O. I., Kladko, V. P., Litovchenko, V. G., Melnik, V. P., Oberemok, O. S., Popov, V. G., Polishchuk, Yu. O., Romaniuk, B. M., Chernenko, V. V., Nasekа, V. M.
• Format: Article
• Language: English; Ukrainian
• Published: Publishing house "Academperiodika" 2018
• Subjects: кремнiй; гетерування; залiзо; дефекти; час життя; рентгенiвська дифрактометрiя; мас-спектрометрiя
• Online Access: https://ujp.bitp.kiev.ua/index.php/ujp/article/view/2018365
• Journal Title: Ukrainian Journal of Physics

A comparative study of the defect formation and changes in the lifetime of nonequilibrium minority charge carriers in silicon while gettering the iron impurity with the use of a combined getter “porous silicon layer + aluminum film” is carried out. It is shown that, while annealing specimens with no...