Дослiдження рекомбiнацiйних характеристик Cz-кремнiю, iмплантованого iонами залiза
A comparative study of the defect formation and changes in the lifetime of nonequilibrium minority charge carriers in silicon while gettering the iron impurity with the use of a combined getter “porous silicon layer + aluminum film” is carried out. It is shown that, while annealing specimens with no...
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| Date: | 2018 |
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| Main Authors: | , , , , , , , , , , |
| Format: | Article |
| Language: | English Ukrainian |
| Published: |
Publishing house "Academperiodika"
2018
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| Subjects: | |
| Online Access: | https://ujp.bitp.kiev.ua/index.php/ujp/article/view/2018365 |
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| Journal Title: | Ukrainian Journal of Physics |