Спектроскопія у зазорі: фаза відбитої хвилі і характеризація плівок

• Date: 2018
• Main Author: Turchin, A. V.
• Format: Article
• Language: Ukrainian; English
• Published: Publishing house "Academperiodika" 2018
• Subjects: iнтерферометрiя; хвильова фаза; характеристика поверхнi; зворотна задача
• Online Access: https://ujp.bitp.kiev.ua/index.php/ujp/article/view/2018592
• Journal Title: Ukrainian Journal of Physics

Optical methods that are used to characterize the state of a surface covered with films are based on the measurement of either the ratio between the complex reflection coefficients for mutually orthogonal light polarizations (ellipsometry) or the magnitudes of reflection coefficients themselves; aft...