Новий Zno/Au/Zno польовий транзистор з широким затвором як сенсорна мембрана
ZnO/Au/ZnO (ZAuZ) multilayer structures with different thicknesses are deposited on a glass substrate by using the RF and DC magnetron sputtering methods and then are used as extended gates in field effect transistors (FET) for the pH detection. Their structural, optical, and electrical properties a...
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Date: | 2018 |
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Main Authors: | , , |
Format: | Article |
Language: | English |
Published: |
Publishing house "Academperiodika"
2018
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Online Access: | https://ujp.bitp.kiev.ua/index.php/ujp/article/view/2018647 |
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Journal Title: | Ukrainian Journal of Physics |