Вплив пеннiнговської iонiзацiї на баланс заряджених частинок у плазмi стацiонарного вiдбивного розряду
A model of stationary reflex discharge, which is based on the volume-averaged (global) one, has been considered in the case of weakly ionized non-isothermal plasma. The temperature and the density of plasma electrons are calculated. The process of cathode sputtering and the formation of sputtered io...
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| Date: | 2019 |
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| Main Authors: | , , , |
| Format: | Article |
| Language: | English |
| Published: |
Publishing house "Academperiodika"
2019
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| Online Access: | https://ujp.bitp.kiev.ua/index.php/ujp/article/view/2019048 |
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| Journal Title: | Ukrainian Journal of Physics |