Механiзми модифiкацiї профiлiв розподiлу домiшок при мас-спектрометричному аналiзi багатошарових наноструктур

• Date: 2019
• Main Authors: Efremov, A. A., Litovchenko, V. G., Melnik, V. P., Oberemok, O. S., Popov, V. G., Romanyuk, B. M.
• Format: Article
• Language: English; Ukrainian
• Published: Publishing house "Academperiodika" 2019
• Subjects: моделювання; iонне розпилення; багатошаровi структури; профiлi розподiлу; мас-спектрометрiя
• Online Access: https://ujp.bitp.kiev.ua/index.php/ujp/article/view/2019221
• Journal Title: Ukrainian Journal of Physics

Mechanisms of the spatial redistribution of components in a solid target at its ion bombardment have been analyzed theoretically. The influence of the ion mixing, crater shape, and surface roughness on the results of mass spectrometric measurements is simulated as a function of the ion energy. All t...