Механiзми еволюцiї поверхнi при ростi нелегованих нанокремнiєвих плiвок
The thickness dependence of the surface roughness and the grain size of nanosilicon films, produced by low-pressure chemical vapour deposition, has been found, by using atomic force microscopy. A correlation between the surface roughness, grain size, and transformation of a film structure from the e...
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| Datum: | 2019 |
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| Hauptverfasser: | , , |
| Format: | Artikel |
| Sprache: | English Ukrainian |
| Veröffentlicht: |
Publishing house "Academperiodika"
2019
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| Schlagworte: | |
| Online Zugang: | https://ujp.bitp.kiev.ua/index.php/ujp/article/view/2019277 |
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| Назва журналу: | Ukrainian Journal of Physics |