Механiзми еволюцiї поверхнi при ростi нелегованих нанокремнiєвих плiвок

• Datum: 2019
• Hauptverfasser: Nakhodkin, N. G., Rodionova, T. V., Sutyagina, A. S.
• Format: Artikel
• Sprache: English; Ukrainian
• Veröffentlicht: Publishing house "Academperiodika" 2019
• Schlagworte: нанокремнiєвi плiвки; поверхневi неоднорiдностi; рiст зерен; механiзм росту зерен; атомна силова мiкроскопiя
• Online Zugang: https://ujp.bitp.kiev.ua/index.php/ujp/article/view/2019277
• Назва журналу: Ukrainian Journal of Physics

The thickness dependence of the surface roughness and the grain size of nanosilicon films, produced by low-pressure chemical vapour deposition, has been found, by using atomic force microscopy. A correlation between the surface roughness, grain size, and transformation of a film structure from the e...