Взаємодiя молекулярного кисню з поверхнею Si(001), вкритою моношарами хрому та титану

The results of experimental researches concerning the initial stages of the interaction between the Si(001) surface covered with a chromium or titanium monolayer and molecular oxygen at exposures to 107L (Langmuir) are reported. On the basis of experimental data, the coefficient of molecular oxygen...

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Bibliographic Details
Date:2019
Main Authors: Koval, I. P., Len, Yu. A., Nakhodkin, M. G., Svishevs’kyi, M. O., Yakovenko, M. Yu.
Format: Article
Language:English
Ukrainian
Published: Publishing house "Academperiodika" 2019
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Online Access:https://ujp.bitp.kiev.ua/index.php/ujp/article/view/2019286
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Journal Title:Ukrainian Journal of Physics

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Ukrainian Journal of Physics
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Summary:The results of experimental researches concerning the initial stages of the interaction between the Si(001) surface covered with a chromium or titanium monolayer and molecular oxygen at exposures to 107L (Langmuir) are reported. On the basis of experimental data, the coefficient of molecular oxygen sticking is calculated. It is shown that not only silicon but also titanium oxides are formed on the Si(001) surface covered with a titanium monolayer. The researches are carried out, by using the Auger electron spectroscopy method.