2025-02-24T00:22:28-05:00 DEBUG: VuFindSearch\Backend\Solr\Connector: Query fl=%2A&wt=json&json.nl=arrarr&q=id%3A%22ujp2-article-2021247%22&qt=morelikethis&rows=5
2025-02-24T00:22:28-05:00 DEBUG: VuFindSearch\Backend\Solr\Connector: => GET http://localhost:8983/solr/biblio/select?fl=%2A&wt=json&json.nl=arrarr&q=id%3A%22ujp2-article-2021247%22&qt=morelikethis&rows=5
2025-02-24T00:22:28-05:00 DEBUG: VuFindSearch\Backend\Solr\Connector: <= 200 OK
2025-02-24T00:22:28-05:00 DEBUG: Deserialized SOLR response
Вплив парціального тиску азоту на реактивне магнетронне розпилення Ti13Cu87 мішені: моделювання хімічного складу
A sintered Ti13Cu87 composite target was reactively sputtered in Ar–N2 gas mixtures, and sputtered species were deposited on Si (111) substrates. We study the pressure-dependent target mode variation of the Ti13Cu87–N2 system, by measuring the N2 partial pressure, deposition rate, target voltage, an...
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| Main Authors: | , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Publishing house "Academperiodika"
2012
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| Subjects: | |
| Online Access: | https://ujp.bitp.kiev.ua/index.php/ujp/article/view/2021247 |
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