2025-02-24T00:32:49-05:00 DEBUG: VuFindSearch\Backend\Solr\Connector: Query fl=%2A&wt=json&json.nl=arrarr&q=id%3A%22ujp2-article-2021247%22&qt=morelikethis&rows=5
2025-02-24T00:32:49-05:00 DEBUG: VuFindSearch\Backend\Solr\Connector: => GET http://localhost:8983/solr/biblio/select?fl=%2A&wt=json&json.nl=arrarr&q=id%3A%22ujp2-article-2021247%22&qt=morelikethis&rows=5
2025-02-24T00:32:49-05:00 DEBUG: VuFindSearch\Backend\Solr\Connector: <= 200 OK
2025-02-24T00:32:49-05:00 DEBUG: Deserialized SOLR response
Вплив парціального тиску азоту на реактивне магнетронне розпилення Ti13Cu87 мішені: моделювання хімічного складу

Вплив парціального тиску азоту на реактивне магнетронне розпилення Ti13Cu87 мішені: моделювання хімічного складу

A sintered Ti13Cu87 composite target was reactively sputtered in Ar–N2 gas mixtures, and sputtered species were deposited on Si (111) substrates. We study the pressure-dependent target mode variation of the Ti13Cu87–N2 system, by measuring the N2 partial pressure, deposition rate, target voltage, an...

Full description

Saved in:
Bibliographic Details
Main Authors: Rahmati, A., Khanzadeh, M.
Format: Article
Language:English
Published: Publishing house "Academperiodika" 2012
Subjects:
-
Online Access:https://ujp.bitp.kiev.ua/index.php/ujp/article/view/2021247
Tags: Add Tag
No Tags, Be the first to tag this record!

Similar Items

2025-02-24T00:32:49-05:00 DEBUG: VuFindSearch\Backend\Solr\Connector: Query fl=%2A&rows=40&rows=5&wt=json&json.nl=arrarr&q=id%3A%22ujp2-article-2021247%22&qt=morelikethis
2025-02-24T00:32:49-05:00 DEBUG: VuFindSearch\Backend\Solr\Connector: => GET http://localhost:8983/solr/biblio/select?fl=%2A&rows=40&rows=5&wt=json&json.nl=arrarr&q=id%3A%22ujp2-article-2021247%22&qt=morelikethis
2025-02-24T00:32:49-05:00 DEBUG: VuFindSearch\Backend\Solr\Connector: <= 200 OK
2025-02-24T00:32:49-05:00 DEBUG: Deserialized SOLR response

Similar Items