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Plasma etching of gallium nitride based heterostructures in production of optoelectronic devices by S. V. Dudin

Published 2006

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Automated system for real-time control of plasma-chemical etching process in ICP by S. V. Dudin

Published 2006

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Research and development of technological systems based on high-frequency induction discharge for reactive ion-plasma etching of micro- and nanostructures by S. V. Dudin

Published 2009

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Langmuir probe in ion-beam plasma: theory VS experiment by S. V. Dudin

Published 2012

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Рhysics and design of wide-aperture bipolar particle sources by Dudin, S.V.

Published in Вопросы атомной науки и техники (2013)

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Langmuir probe in ion-beam plasma: theory VS experiment by Dudin, S.V.

Published in Физическая инженерия поверхности (2012)

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Generalize the differences: the differentiation of legal regulation of labor relations in Ukraine and EU countries by V. M. Dudin

Published 2018

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Закономерности формирования пучка ионов низкой энергии при помощи односеточной ионно-оптической системы... by Dudin, S. V., Rafalskyi, D. V.

Published 2009

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Influence of secondary electron emission on the RF gas breakdown by Dakhov, A.N., Dudin, S.V.

Published in Вопросы атомной науки и техники (2013)

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Synthesis of thin-film Ta₂O₅ coatings by reactive magnetron sputtering by Yakovin, S., Zykov, A., Dudin, S., Yefymenko, N.

Published in Вопросы атомной науки и техники (2016)

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Conversion of carbon dioxide in low-pressure plasma by Dudin, S.V., Dakhov, A.N.

Published in Вопросы атомной науки и техники (2018)

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Optical and mass spectra from reactive plasma at magnetron deposition of tantalum oxynitride by Dudin, S., Yakovin, S., Zykov, A., Yefymenko, N.

Published in Вопросы атомной науки и техники (2021)

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Kinetic simulaton of CO₂ conversion in low-pressure electrodeless plasma by Dudin, S., Lisovskiy, V., Platonov, P., Rezunenko, S.

Published in Problems of Atomic Science and Technology (2022)

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Actinometric study of oxygen dissociation in ICP source by Dakhov, A.N., Dudin, S.V.

Published in Вопросы атомной науки и техники (2014)

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Comparative study of positive and negative ion flows extracted from downstream plasmas beyond magnetic and electrostatic electron filters by Dudin, S., Rafalskyi, D., Popelier, L., Aanesland, A.

Published in Физическая инженерия поверхности (2012)

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Synthesis of dielectric compounds based on a DC magnetron by O. V. Zykov, S. D. Yakovin, S. V. Dudin

Published 2009

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Stationary regimes of low pressure magnetron discharge by A. V. Zykov, S. V. Dudin, S. D. Jakovin

Published 2015

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Comparative study of positive and negative ion flows extracted from downstream plasmas beyond magnetic and electrostatic electron filters by S. Dudin, D. Rafalskyi, L. Popelier, A. Aanesland

Published 2012

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19

Technological aprobation of integral cluster setup for complex compound composites syntesis by Yakovin, S., Dudin, S., Zykov, A., Shyshkov, A., Farenik, V.

Published in Вопросы атомной науки и техники (2012)

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Investigation of interaction between ion-beam plasma and processed surface during the synthesis of tantalum diboride and pentaoxide by Yakovin, S., Zykov, A., Dudin, S., Dakhov, A., Yefymenko, N.

Published in Вопросы атомной науки и техники (2019)

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Search Results - S. Dudin

Plasma etching of gallium nitride based heterostructures in production of optoelectronic devices by S. V. Dudin

Automated system for real-time control of plasma-chemical etching process in ICP by S. V. Dudin

Research and development of technological systems based on high-frequency induction discharge for reactive ion-plasma etching of micro- and nanostructures by S. V. Dudin

Langmuir probe in ion-beam plasma: theory VS experiment by S. V. Dudin

Рhysics and design of wide-aperture bipolar particle sources by Dudin, S.V.

Langmuir probe in ion-beam plasma: theory VS experiment by Dudin, S.V.

Generalize the differences: the differentiation of legal regulation of labor relations in Ukraine and EU countries by V. M. Dudin

Закономерности формирования пучка ионов низ­кой энер­гии при по­мо­щи од­но­се­точ­ной ион­но-оп­ти­чес­кой сис­те­мы... by Dudin, S. V., Rafalskyi, D. V.

Influence of secondary electron emission on the RF gas breakdown by Dakhov, A.N., Dudin, S.V.

Synthesis of thin-film Ta₂O₅ coatings by reactive magnetron sputtering by Yakovin, S., Zykov, A., Dudin, S., Yefymenko, N.

Conversion of carbon dioxide in low-pressure plasma by Dudin, S.V., Dakhov, A.N.

Optical and mass spectra from reactive plasma at magnetron deposition of tantalum oxynitride by Dudin, S., Yakovin, S., Zykov, A., Yefymenko, N.

Kinetic simulaton of CO₂ conversion in low-pressure electrodeless plasma by Dudin, S., Lisovskiy, V., Platonov, P., Rezunenko, S.

Actinometric study of oxygen dissociation in ICP source by Dakhov, A.N., Dudin, S.V.

Comparative study of positive and negative ion flows extracted from downstream plasmas beyond magnetic and electrostatic electron filters by Dudin, S., Rafalskyi, D., Popelier, L., Aanesland, A.

Synthesis of dielectric compounds based on a DC magnetron by O. V. Zykov, S. D. Yakovin, S. V. Dudin

Stationary regimes of low pressure magnetron discharge by A. V. Zykov, S. V. Dudin, S. D. Jakovin

Comparative study of positive and negative ion flows extracted from downstream plasmas beyond magnetic and electrostatic electron filters by S. Dudin, D. Rafalskyi, L. Popelier, A. Aanesland

Technological aprobation of integral cluster setup for complex compound composites syntesis by Yakovin, S., Dudin, S., Zykov, A., Shyshkov, A., Farenik, V.

Investigation of interaction between ion-beam plasma and processed surface during the synthesis of tantalum diboride and pentaoxide by Yakovin, S., Zykov, A., Dudin, S., Dakhov, A., Yefymenko, N.

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Закономерности формирования пучка ионов низкой энергии при помощи односеточной ионно-оптической системы... by Dudin, S. V., Rafalskyi, D. V.