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Efremov, A.A.
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Efremov, A.A.
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Efremov, A.A.
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The enhanced catalytic dissociation of adsorbed hydrogen containing molecules
by
Litovchenko, V.G.
,
Efremov, A.A.
Published in
Condensed Matter Physics
(1999)
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2
Механiзми модифiкацiї профiлiв розподiлу домiшок при мас-спектрометричному аналiзi багатошарових наноструктур...
by
Efremov, A. A.
,
Litovchenko, V. G.
,
Melnik, V. P.
,
Oberemok, O. S.
,
Popov, V. G.
,
Romanyuk, B. M.
Published 2019
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3
Increase of planar homogeneity of multi-silicon structures by gettering treatments
by
Litovchenko, V.G.
,
Efremov, A.A.
,
Evtukh, A.A.
,
Rassamakin, Yu.V.
,
Klyui, M.I.
,
Kostylov, V.P.
Published 2001
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Related Subjects
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depth profile
iонне розпилення
mass spectrometry
multilayer structure
simulation
sputtering
багатошаровi структури
мас-спектрометрiя
моделювання
профiлi розподiлу