Search Results - Grigoriev, N.N.

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    Моделирование процессов бесконтактного химикомеханического изготовления подложек полупроводников... by Grigoriev, N. N., Kravetsky, M. Yu., Pashchenko, G. A., Sypko, S. A., Fomin, A. V.

    Published 2003
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    Balance model for contactless chemo-mechanical polishing of wafers by Grigoriev, N.N., Kravetsky, M.Yu., Paschenko, G.A., Sypko, S.A., Fomin, A.V.

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