Deposition and characterization of thin Si–B–C–N films by dc reactive magnetron sputtering of composed Si/B₄C target von Onoprienko, A.A., Ivashchenko, V.I., Kozak, A.O., Sinelnichenko, A.K., Tomila, T.V.

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Comparative investigation of NbN and Nb–Si–N films: experiment and theory von Ivashchenko, V.I., Scrynskyy, P.L., Lytvyn, O.S., Butenko, O.O., Sinelnichenko, O.K., Gorb, L., Hill, F., Leszczynski, J., Kozak, A.O.

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