Харвестер відкритої науки НАН України

Investigation of the effect of technological parameters on efficiency of chemical string cutting of semiconductor materials

von Kravetsky, M.Yu., Sypko, S.A., Fomin, A.V.
Veröffentlicht in Semiconductor Physics Quantum Electronics & Optoelectronics (2002)

Balance model for contactless chemo-mechanical polishing of wafers

von Grigoriev, N.N., Kravetsky, M.Yu., Paschenko, G.A., Sypko, S.A., Fomin, A.V.
Veröffentlicht in Semiconductor Physics Quantum Electronics & Optoelectronics (2002)