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Registration Materials for Laser Thermolithography

Registration Materials for Laser Thermolithography

The results of analysis on the photosensitive properties of materials with nonlinear exposition characteristic have been performed. It is shown that some photo(thermo)sensitive materials allow to register the image of elements having sizes less than the diameter of exposing beam. The results of lase...

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Bibliographic Details
Main Authors: Kryuchyn, A. A., Rubish, V. M., Kostiukevych, S. O., Minko, V. I., Shepelyavy, P. E., Lysyuk, V. O., Kostyukevych, K. V., Surmach, M. A.
Format: Article
Language:Ukrainian
Published: Інститут проблем реєстрації інформації НАН України 2012
Subjects:
термолітографія
неорганічні фоторезисти
нелінійна експозиційна характеристика
термолитография
неорганические фоторезисты
нелинейная экспозиционная характеристика
thermolithography
inorganic photoresists
nonlinear exposure characteristics
Online Access:http://drsp.ipri.kiev.ua/article/view/105215
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Summary:The results of analysis on the photosensitive properties of materials with nonlinear exposition characteristic have been performed. It is shown that some photo(thermo)sensitive materials allow to register the image of elements having sizes less than the diameter of exposing beam. The results of laser writing to inorganic photoresists are presented. Fig.: 3. Refs: 21 titles.

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