2025-02-23T09:24:45-05:00 DEBUG: VuFindSearch\Backend\Solr\Connector: Query fl=%2A&wt=json&json.nl=arrarr&q=id%3A%22drspiprikievua-article-105215%22&qt=morelikethis&rows=5
2025-02-23T09:24:45-05:00 DEBUG: VuFindSearch\Backend\Solr\Connector: => GET http://localhost:8983/solr/biblio/select?fl=%2A&wt=json&json.nl=arrarr&q=id%3A%22drspiprikievua-article-105215%22&qt=morelikethis&rows=5
2025-02-23T09:24:45-05:00 DEBUG: VuFindSearch\Backend\Solr\Connector: <= 200 OK
2025-02-23T09:24:45-05:00 DEBUG: Deserialized SOLR response
Registration Materials for Laser Thermolithography

Registration Materials for Laser Thermolithography

The results of analysis on the photosensitive properties of materials with nonlinear exposition characteristic have been performed. It is shown that some photo(thermo)sensitive materials allow to register the image of elements having sizes less than the diameter of exposing beam. The results of lase...

Full description

Saved in:
Bibliographic Details
Main Authors: Kryuchyn, A. A., Rubish, V. M., Kostiukevych, S. O., Minko, V. I., Shepelyavy, P. E., Lysyuk, V. O., Kostyukevych, K. V., Surmach, M. A.
Format: Article
Language:Ukrainian
Published: Інститут проблем реєстрації інформації НАН України 2012
Subjects:
термолітографія
неорганічні фоторезисти
нелінійна експозиційна характеристика
термолитография
неорганические фоторезисты
нелинейная экспозиционная характеристика
thermolithography
inorganic photoresists
nonlinear exposure characteristics
Online Access:http://drsp.ipri.kiev.ua/article/view/105215
Tags: Add Tag
No Tags, Be the first to tag this record!

Similar Items

2025-02-23T09:24:45-05:00 DEBUG: VuFindSearch\Backend\Solr\Connector: Query fl=%2A&rows=40&rows=5&wt=json&json.nl=arrarr&q=id%3A%22drspiprikievua-article-105215%22&qt=morelikethis
2025-02-23T09:24:45-05:00 DEBUG: VuFindSearch\Backend\Solr\Connector: => GET http://localhost:8983/solr/biblio/select?fl=%2A&rows=40&rows=5&wt=json&json.nl=arrarr&q=id%3A%22drspiprikievua-article-105215%22&qt=morelikethis
2025-02-23T09:24:45-05:00 DEBUG: VuFindSearch\Backend\Solr\Connector: <= 200 OK
2025-02-23T09:24:45-05:00 DEBUG: Deserialized SOLR response

Similar Items