Registration Materials for Laser Thermolithography
The results of analysis on the photosensitive properties of materials with nonlinear exposition characteristic have been performed. It is shown that some photo(thermo)sensitive materials allow to register the image of elements having sizes less than the diameter of exposing beam. The results of lase...
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| Date: | 2012 |
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| Main Authors: | , , , , , , , |
| Format: | Article |
| Language: | Ukrainian |
| Published: |
Інститут проблем реєстрації інформації НАН України
2012
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| Subjects: | |
| Online Access: | http://drsp.ipri.kiev.ua/article/view/105215 |
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| Journal Title: | Data Recording, Storage & Processing |