The use of chalcogenide glassy semiconductors to create micro- and nanoscale structures

• Date: 2020
• Main Authors: Petrov, V. V., Kryuchуn, A. A., Rubish, V. M., Kostyukevуch, S. A., Shepeliavyi, P. E.
• Format: Article
• Language: Ukrainian
• Published: Інститут проблем реєстрації інформації НАН України 2020
• Subjects: nanostructures; chalcogenide vitreous semiconductors; inorganic resists; plasmons; near field
• Online Access: http://drsp.ipri.kiev.ua/article/view/211249
• Journal Title: Data Recording, Storage & Processing

The results on the analysis of methods for the formation of nanoscale elements on thin films of chalcogenide glassy semiconductors and their application to create optical diffraction elements are presented. When creating micro- and nanoelements of optoelectronic devices, micro / nanoelectromechanica...