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The use of chalcogenide glassy semiconductors to create micro- and nanoscale structures

The results on the analysis of methods for the formation of nanoscale elements on thin films of chalcogenide glassy semiconductors and their application to create optical diffraction elements are presented. When creating micro- and nanoelements of optoelectronic devices, micro / nanoelectromechanica...

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Bibliographic Details
Date:	2020
Main Authors:	Petrov, V. V., Kryuchуn, A. A., Rubish, V. M., Kostyukevуch, S. A., Shepeliavyi, P. E.
Format:	Article
Language:	Ukrainian
Published:	Інститут проблем реєстрації інформації НАН України 2020
Subjects:	nanostructures chalcogenide vitreous semiconductors inorganic resists plasmons near field
Online Access:	http://drsp.ipri.kiev.ua/article/view/211249
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Journal Title:	Data Recording, Storage & Processing

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