Direct laser writing technology for microrelief metal structures on thin chromium films

• Date: 2026
• Main Authors: Чегіль, Ю. І., Буток, О. М., Беляк, Є. В., Крючин, А. А.
• Format: Article
• Language: Ukrainian
• Published: Інститут проблем реєстрації інформації НАН України 2026
• Subjects: direct laser writing; laser ablation; microrelief structures; thin chromium films; diffraction optical elements; pulsed laser radiation; laser micromachining
• Online Access: https://drsp.ipri.kiev.ua/article/view/363130
• Journal Title: Data Recording, Storage & Processing

Direct laser writing is increasingly considered a promising maskless alternative to conventional photolithography for the fabrication of microrelief structures required in photonics, micro-optics, and information-optical systems. The present study investigates the formation of micro-structured relie...