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Magnetron sputtering of high temperature composite ceramics AlN-TiB₂-TiSi₂

Magnetron sputtering of high temperature composite ceramics AlN-TiB₂-TiSi₂

By means of the magnetron sputtering method using the DC and pulsed voltages applied to the target, the coatings based on AlN-TiB₂-TiSi₂ ceramics were obtained. An amorphous-like structure of the obtained coatings was revealed. It had the area of ordering ~ 1 nm and the viscoplasticity coefficie...

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Bibliographic Details
Main Authors: Torianik, I.N., Beresnev, V.M., Pogrebnjak, A.D., Sobol, O.V., Beresneva, Ye.V., Podcherniaieva, I.A., Kropotov, A.Yu., Stiervoiedov, N.G., Turbin, P.V., Kolesnikov, D.A., Grankin, S.S., Nyemchenko, U.S., Srebniuk, P.A., Novikov, V.Yu.
Format: Article
Language:English
Published: Науковий фізико-технологічний центр МОН та НАН України 2013
Series:Физическая инженерия поверхности
Online Access:http://dspace.nbuv.gov.ua/handle/123456789/100317
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http://dspace.nbuv.gov.ua/handle/123456789/100317

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