2025-02-23T06:54:01-05:00 DEBUG: VuFindSearch\Backend\Solr\Connector: Query fl=%2A&wt=json&json.nl=arrarr&q=id%3A%22irk-123456789-100479%22&qt=morelikethis&rows=5
2025-02-23T06:54:01-05:00 DEBUG: VuFindSearch\Backend\Solr\Connector: => GET http://localhost:8983/solr/biblio/select?fl=%2A&wt=json&json.nl=arrarr&q=id%3A%22irk-123456789-100479%22&qt=morelikethis&rows=5
2025-02-23T06:54:01-05:00 DEBUG: VuFindSearch\Backend\Solr\Connector: <= 200 OK
2025-02-23T06:54:01-05:00 DEBUG: Deserialized SOLR response
Deposition of borophosphosilicate glass films using the TEOS–dimethylphosphite–trimethylborate system
Modernization of horizontal low pressure deposition system has been performed. The liquid source delivery system using the bubblers has been developed. The PSG and BPSG film deposition processes and film properties using TEOS-Dimethylphosphite-TEB system have been studied. It is shown that the use o...
Saved in:
| Main Authors: | , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
2015
|
| Series: | Технология и конструирование в электронной аппаратуре |
| Subjects: | |
| Online Access: | http://dspace.nbuv.gov.ua/handle/123456789/100479 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|