2025-02-23T12:17:57-05:00 DEBUG: VuFindSearch\Backend\Solr\Connector: Query fl=%2A&wt=json&json.nl=arrarr&q=id%3A%22irk-123456789-100479%22&qt=morelikethis&rows=5
2025-02-23T12:17:57-05:00 DEBUG: VuFindSearch\Backend\Solr\Connector: => GET http://localhost:8983/solr/biblio/select?fl=%2A&wt=json&json.nl=arrarr&q=id%3A%22irk-123456789-100479%22&qt=morelikethis&rows=5
2025-02-23T12:17:57-05:00 DEBUG: VuFindSearch\Backend\Solr\Connector: <= 200 OK
2025-02-23T12:17:57-05:00 DEBUG: Deserialized SOLR response
Deposition of borophosphosilicate glass films using the TEOS–dimethylphosphite–trimethylborate system

Deposition of borophosphosilicate glass films using the TEOS–dimethylphosphite–trimethylborate system

Modernization of horizontal low pressure deposition system has been performed. The liquid source delivery system using the bubblers has been developed. The PSG and BPSG film deposition processes and film properties using TEOS-Dimethylphosphite-TEB system have been studied. It is shown that the use o...

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Bibliographic Details
Main Authors: Turtsevich, A.S., Nalivaiko, O.Y.
Format: Article
Language:English
Published: Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України 2015
Series:Технология и конструирование в электронной аппаратуре
Subjects:
Материалы электроники
Online Access:http://dspace.nbuv.gov.ua/handle/123456789/100479
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2025-02-23T12:17:57-05:00 DEBUG: VuFindSearch\Backend\Solr\Connector: Query fl=%2A&rows=40&rows=5&wt=json&json.nl=arrarr&q=id%3A%22irk-123456789-100479%22&qt=morelikethis
2025-02-23T12:17:57-05:00 DEBUG: VuFindSearch\Backend\Solr\Connector: => GET http://localhost:8983/solr/biblio/select?fl=%2A&rows=40&rows=5&wt=json&json.nl=arrarr&q=id%3A%22irk-123456789-100479%22&qt=morelikethis
2025-02-23T12:17:57-05:00 DEBUG: VuFindSearch\Backend\Solr\Connector: <= 200 OK
2025-02-23T12:17:57-05:00 DEBUG: Deserialized SOLR response

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