High-current pulsed operation modes of the planar MSS with magnetically insulated anode without transition to the arc discharge
In this work, the characteristics of high-current operation modes of planar magnetron sputtering system with magnetically insulated anode without going to the arc discharge mode is investigated. The possibility of using an additional spatially modulated magnetic field in the anode region to prevent...
Збережено в:
| Дата: | 2012 |
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| Автори: | , , , , |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2012
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| Назва видання: | Вопросы атомной науки и техники |
| Теми: | |
| Онлайн доступ: | http://dspace.nbuv.gov.ua/handle/123456789/109210 |
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| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Цитувати: | High-current pulsed operation modes of the planar MSS with magnetically insulated anode without transition to the arc discharge / A.A. Bizyukov, K.N. Sereda, V.V. Sleptsov, I.K. Tarasov, A.G. Chunadra // Вопросы атомной науки и техники. — 2012. — № 6. — С. 190-192. — Бібліогр.: 6 назв. — англ. |
Репозитарії
Digital Library of Periodicals of National Academy of Sciences of Ukraine| Резюме: | In this work, the characteristics of high-current operation modes of planar magnetron sputtering system with magnetically insulated anode without going to the arc discharge mode is investigated. The possibility of using an additional spatially modulated magnetic field in the anode region to prevent a transition from the magnetron to the arc is shown experimentally. It is shown that the use of such a magnetic field configuration provides efficient interruption of the arc current without external forced shutdown of the discharge. |
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