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Influence of multipolar magnetic field geometry of ECR planar plasma source on plasma parameters

The plasma parameters and its homogeneity were measured in ECR planar plasma source with multipolar magnetic field, which is created by three parallel magnetic bars of 12 cm in length consisted of set of the permanent magnets of 2 cm length. Geometry of the multipolar magnetic field is able to be ch...

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Bibliographic Details
Main Authors: Fedorchenko, V.D., Chebotarev, V.V., Garkusha, I.E., Medvedev, A.V., Tereshin, V.I., Shevchuk, B.A.
Format: Article
Language:English
Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2008
Series:Вопросы атомной науки и техники
Subjects:
Online Access:http://dspace.nbuv.gov.ua/handle/123456789/111033
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