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Influence of multipolar magnetic field geometry of ECR planar plasma source on plasma parameters

Influence of multipolar magnetic field geometry of ECR planar plasma source on plasma parameters

The plasma parameters and its homogeneity were measured in ECR planar plasma source with multipolar magnetic field, which is created by three parallel magnetic bars of 12 cm in length consisted of set of the permanent magnets of 2 cm length. Geometry of the multipolar magnetic field is able to be ch...

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Bibliographic Details
Main Authors: Fedorchenko, V.D., Chebotarev, V.V., Garkusha, I.E., Medvedev, A.V., Tereshin, V.I., Shevchuk, B.A.
Format: Article
Language:English
Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2008
Series:Вопросы атомной науки и техники
Subjects:
Low temperature plasma and plasma technologies
Online Access:http://dspace.nbuv.gov.ua/handle/123456789/111033
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Summary:The plasma parameters and its homogeneity were measured in ECR planar plasma source with multipolar magnetic field, which is created by three parallel magnetic bars of 12 cm in length consisted of set of the permanent magnets of 2 cm length. Geometry of the multipolar magnetic field is able to be changed by variation of the polarity and the distance between separate magnets along the bars. For magnetic system with alternative orientation of the magnetic field the plasma density up to 2.8×10¹⁰ сm¯³ and the electron temperature about 20-22 eV were measured within the area ~ 75 cm² at the distance of 2 cm apart the magnetic structure. The uncompensated ion flow with the energies of 16-18 eV was observed for all configurations of magnetic field.

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