Structure and properties of W, Ta and W-Ta coatings deposited with the use of a gas-plasma source

• Main Authors: Lunyov, V.M., Kuprin, A.S., Ovcharenko, V.D., Belous, V.A., Morozov, A.N., Ilchenko, A.V., Tolmachova, G.N., Reshetnyak, E.N., Vasilenko, R.L.
• Format: Article
• Language: English
• Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2016
• Series: Вопросы атомной науки и техники
• Subjects: Физика и технология конструкционных материалов
• Online Access: http://dspace.nbuv.gov.ua/handle/123456789/111766

W, Ta and W-Ta coatings were deposited by argon ion sputtering of targets made from appropriate metals using the gas plasma source. Mechanical properties of the obtained coatings were investigated by the methods of X-ray fluorescence analysis, scanning electron microscopy, X-ray diffraction analysis...