Metrological aspects of researching the specific contact resistivity of ohmic contacts by using the four-contact method
In this paper, we have considered the four-contact method for measurements of the specific contact resistivity of the ohmic contacts (ρc). The presented method for measuring ρc has been compared with several other methods. Limits of applying this method have been shown.
Збережено в:
| Дата: | 2014 |
|---|---|
| Автор: | |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
2014
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| Назва видання: | Semiconductor Physics Quantum Electronics & Optoelectronics |
| Онлайн доступ: | http://dspace.nbuv.gov.ua/handle/123456789/118426 |
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| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Цитувати: | Metrological aspects of researching the specific contact resistivity of ohmic contacts by using the four-contact method / V.N. Sheremet // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2014. — Т. 17, № 4. — С. 394-397. — Бібліогр.: 8 назв. — англ. |
Репозитарії
Digital Library of Periodicals of National Academy of Sciences of Ukraine| id |
irk-123456789-118426 |
|---|---|
| record_format |
dspace |
| spelling |
irk-123456789-1184262017-05-31T03:07:10Z Metrological aspects of researching the specific contact resistivity of ohmic contacts by using the four-contact method Sheremet, V.N. In this paper, we have considered the four-contact method for measurements of the specific contact resistivity of the ohmic contacts (ρc). The presented method for measuring ρc has been compared with several other methods. Limits of applying this method have been shown. 2014 Article Metrological aspects of researching the specific contact resistivity of ohmic contacts by using the four-contact method / V.N. Sheremet // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2014. — Т. 17, № 4. — С. 394-397. — Бібліогр.: 8 назв. — англ. 1560-8034 PACS 73.40.Ns, 73.40.Cg, 85.40.-e http://dspace.nbuv.gov.ua/handle/123456789/118426 en Semiconductor Physics Quantum Electronics & Optoelectronics Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України |
| institution |
Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| collection |
DSpace DC |
| language |
English |
| description |
In this paper, we have considered the four-contact method for measurements
of the specific contact resistivity of the ohmic contacts (ρc). The presented method for
measuring ρc has been compared with several other methods. Limits of applying this
method have been shown. |
| format |
Article |
| author |
Sheremet, V.N. |
| spellingShingle |
Sheremet, V.N. Metrological aspects of researching the specific contact resistivity of ohmic contacts by using the four-contact method Semiconductor Physics Quantum Electronics & Optoelectronics |
| author_facet |
Sheremet, V.N. |
| author_sort |
Sheremet, V.N. |
| title |
Metrological aspects of researching the specific contact resistivity of ohmic contacts by using the four-contact method |
| title_short |
Metrological aspects of researching the specific contact resistivity of ohmic contacts by using the four-contact method |
| title_full |
Metrological aspects of researching the specific contact resistivity of ohmic contacts by using the four-contact method |
| title_fullStr |
Metrological aspects of researching the specific contact resistivity of ohmic contacts by using the four-contact method |
| title_full_unstemmed |
Metrological aspects of researching the specific contact resistivity of ohmic contacts by using the four-contact method |
| title_sort |
metrological aspects of researching the specific contact resistivity of ohmic contacts by using the four-contact method |
| publisher |
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України |
| publishDate |
2014 |
| url |
http://dspace.nbuv.gov.ua/handle/123456789/118426 |
| citation_txt |
Metrological aspects of researching the specific contact resistivity
of ohmic contacts by using the four-contact method / V.N. Sheremet // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2014. — Т. 17, № 4. — С. 394-397. — Бібліогр.: 8 назв. — англ. |
| series |
Semiconductor Physics Quantum Electronics & Optoelectronics |
| work_keys_str_mv |
AT sheremetvn metrologicalaspectsofresearchingthespecificcontactresistivityofohmiccontactsbyusingthefourcontactmethod |
| first_indexed |
2023-10-18T20:32:18Z |
| last_indexed |
2023-10-18T20:32:18Z |
| _version_ |
1796150453556215808 |