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Research of structures with corrugated photoreceiving surface
Goffered photoreceiver surface in active regions perspective for manufacturing photosensitive structures can be form by chemical and epitaxial technology. Microreliefs are created on initial surface of semiconductor material by chemical method that comprises etching in special solutions. Epitaxial t...
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Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
2004
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Series: | Semiconductor Physics Quantum Electronics & Optoelectronics |
Online Access: | http://dspace.nbuv.gov.ua/handle/123456789/119218 |
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irk-123456789-1192182017-06-06T03:02:55Z Research of structures with corrugated photoreceiving surface Karimov, A.V. Yodgorova, D.M. Yakubov, E.N. Goffered photoreceiver surface in active regions perspective for manufacturing photosensitive structures can be form by chemical and epitaxial technology. Microreliefs are created on initial surface of semiconductor material by chemical method that comprises etching in special solutions. Epitaxial technology allow to obtain goffered layers on etched surface and on the smooth one as well using growth from a liquid phase. In the case of smooth surfaces, chosen are parameters of solutionmelt providing the growth of the layer. The structures with the formed goffered surface have high photosensitivity and a wide optical range for their operation. 2004 Article Research of structures with corrugated photoreceiving surface / A.V. Karimov, D.M. Yodgorova, E.N. Yakubov // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2004. — Т. 7, № 4. — С. 372-376. — Бібліогр.: 4 назв. — англ. 1560-8034 PACS: 42.79.Pw, 68.55 Ac http://dspace.nbuv.gov.ua/handle/123456789/119218 en Semiconductor Physics Quantum Electronics & Optoelectronics Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України |
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Goffered photoreceiver surface in active regions perspective for manufacturing photosensitive structures can be form by chemical and epitaxial technology. Microreliefs are created on initial surface of semiconductor material by chemical method that comprises etching in special solutions. Epitaxial technology allow to obtain goffered layers on etched surface and on the smooth one as well using growth from a liquid phase. In the case of smooth surfaces, chosen are parameters of solutionmelt providing the growth of the layer. The structures with the formed goffered surface have high photosensitivity and a wide optical range for their operation. |
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Article |
author |
Karimov, A.V. Yodgorova, D.M. Yakubov, E.N. |
spellingShingle |
Karimov, A.V. Yodgorova, D.M. Yakubov, E.N. Research of structures with corrugated photoreceiving surface Semiconductor Physics Quantum Electronics & Optoelectronics |
author_facet |
Karimov, A.V. Yodgorova, D.M. Yakubov, E.N. |
author_sort |
Karimov, A.V. |
title |
Research of structures with corrugated photoreceiving surface |
title_short |
Research of structures with corrugated photoreceiving surface |
title_full |
Research of structures with corrugated photoreceiving surface |
title_fullStr |
Research of structures with corrugated photoreceiving surface |
title_full_unstemmed |
Research of structures with corrugated photoreceiving surface |
title_sort |
research of structures with corrugated photoreceiving surface |
publisher |
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України |
publishDate |
2004 |
url |
http://dspace.nbuv.gov.ua/handle/123456789/119218 |
citation_txt |
Research of structures with corrugated photoreceiving surface / A.V. Karimov, D.M. Yodgorova, E.N. Yakubov // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2004. — Т. 7, № 4. — С. 372-376. — Бібліогр.: 4 назв. — англ. |
series |
Semiconductor Physics Quantum Electronics & Optoelectronics |
work_keys_str_mv |
AT karimovav researchofstructureswithcorrugatedphotoreceivingsurface AT yodgorovadm researchofstructureswithcorrugatedphotoreceivingsurface AT yakuboven researchofstructureswithcorrugatedphotoreceivingsurface |
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2023-10-18T20:34:02Z |
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2023-10-18T20:34:02Z |
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1796150537173860352 |